Product Description:
VECTOR HTC-SCA Series detergents are aqueous based synthetic ultrasonic/megasonic detergents
formulated to increase the effectiveness of cavitational energy released upon the surface of Silicon,
Silicon Carbide, Sapphire and Semiconductor Wafers in ultrasonic or megasonic cleaning apparatus. The
products are designed for more effective cleaning of post-sawn, post-ground, post-lapped, post-etched
and post-polished substrates. Used at economical concentrations, VECTOR HTC-SCA Series detergents
will remove light organics, polymers and sub-micron particles typically found on the surface of wafers
including waxes. These contaminants are often the cause of wafer staining and streaking upon
examination after etch.
VECTOR HTC-SCA Series detergents are recommended for pre-cleaning and final cleaning stages of
solar silicon production lines, wherever ultrasonic cleaning is applied. These products will remove organic
and inorganic contamination and particles from both mono-crystalline and multi-crystalline silicon. Tank-
side addition of inorganic alkaline materials can be made to increase the alkalinity and pH of the detergent
for more aggressive cleaning without the use of additional detergent.
Typical Applications:
Ultrasonic/megasonic cleaning of semiconductor and solar wafers post -processing
Benefits:
Superior wetting ability
Aggressively cleans both organic and inorganic residue and particles
Free rinsing - leaves no film or residue
Fully compatible with other VECTOR products
Economical to use and easy to filter.
Typical Properties:                pH     Conductivity mS        Specific Gravity
VECTOR HTC-SCA            11.3            25.0                          1.04
VECTOR HTC-SCA-1          9.1             32.5                          1.05
VECTOR HTC-SCA-1+       13.5            96.3                          1.05
VECTOR HTC-SCA-2         12.3             25.6                         1.04
VECTOR HTC-SCA13        13.2  4          6.7                          1.05
Directions for Use:
VECTOR HTC-SCA Series detergents are used at concentrations between 2% to 6% depending upon the
process and residue to be removed. Begin at dilutions of 4% mixed with deionized (DI) water, although tap
water that does not contain hard water ions is also acceptable. Since the type and degree of residue to be
removed varies, these factors will ultimately determine specific “in-house” dilutions. Other factors to
consider include wafer exposure time and the power of the ultrasonic equipment in use and the
temperature of the tanks.
Additional Information:
VECTOR Products are available in 5-gallon pails and 55-gallon drums, F.O.B. Bethel, Connecticut, and
also include: grinding fluids, sawing fluids, lapping/polishing slurry additives, rinse/wet storage additives
and ultrasonic/megasonic detergents. Material Safety Data Sheets available upon request.